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Turbo vacuum pumps: Edwards (formely known as BOC Edwards) turbomolecular vacuum pumps

Edwards vacuum (formerly BOC Edwards) Turbomolecular pumps: Edwards STP-XA4503C turbomolecular pump

Edwards (formerly BOC Edwards) Vacuum - Turbo pumps and accessories

EXT turbomolecular pumps

EXT75DX compound turbomolecular pump
EXT255DX compound turbomolecular pump
EXT255H compound turbomolecular pump
EXT406PX compound turbomolecular pump
EXT556H compound turbomolecular pump

Turbomolecular pump controllers

Edwards Vacuum: EXC controllers
Edwards Vacuum: TIC turbo controller
Edwards: TIC turbo & instrument controller

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EXT pump to controller cable
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EXPT combined outfits

Edwards EXPT 1 &2 pumping stations

STP magnetically levitated turbomolecular pumps and accessories

Edwards Vacuum - STP turbo pumps
STP-XA4503C turbomolecular pump
STP-iX455 turbomolecular pump
STP301/STP301C turbomolecular pump
STP-L301/STP-L301C turbomolecular pump
STP603/STP603C turbomolecular pump
STP1003/STP1003C turbomolecular pump
STPH301C high performance turbo pump
STPH451C high performance turbo pump
STPA803C "advantage" turbo pump
STPA1303C "advantage" turbo pump
STPA1603C turbomolecular pump
STPA2203C "advantage" turbo pump
STP-XA2703C turbo pump
STP-XA3203C turbo pump

Edwards turbo molecular pumps (turbo vacuum pumps) overview, information and definitions

Edwards Vacuum STP-XA4503C Turbo Vacuum Pump

The STP-XA4503C magnetic bearing turbomolecular pump series has a wide process window, from high vacuum, to high flow requirements with enhanced throughput for all gases.

This pump is based on a new design, offering features to improve thermal management, which enhances performance on harsh processes, increases the maximum process flow capability and reduces the effects of corrosion and deposition.

It has been designed to handle both light and harsh duty applications, such as etch, implant, lithography and FPD processes.

Edwards STP-XA4503C Turbo Vacuum Pump

Edwards Vacuum turbo pumps- STP-XA4503C - Features & benefits

•Advanced rotor design

Increased Argon performance

Highest pumping speed in its class

Wide process window

Higher throughput at lower pressure

Maintenance free

Harsh process compatible

•5-axis magnetic suspension system

Zero contamination

Low vibration

High reliability

•Optimized temperature distribution

Low deposition

Built-in cooling mechanism

Higher gas throughput

Increased operating life

•Certifications

Conforms to international safety standards

UL listed, CE marked and SEMI® S2 compliant

Edwards Vacuum turbo pumps - STP-XA4503C - Dimensions

Edwards Vacuum turbo pumps - STP-XA4503C - Speed and power curve

Edwards Vacuum turbo pumps - STP-XA4503C - Technical data

Inlet flange size
Backing port size
Pumping speed

N2
H2

Compression ratio

N2
H2

Ultimate pressure
Maximum allowable backing pressure
Maximum allowable gas flow*1

N2 (water-cooled only)
Ar (water-cooled only)

Rated speed
Run-up time to 90% rated speed
Mounting position

Water Cooling

Flow
Temperature
Pressure
Recommended purge gas flow N2
Input voltage
Maximum input power (without TMS)
Weight - pump/controller

VG300
KF40

3800 l s^-1
2500 l s^-1
>10⁸
6 x 10³
10^-7 (10^-9) order Pa (mbar)
266 (2.66) Pa (mbar)

2800 (4.73) sccm (Pa m3 s)
2150 (3.63) sccm (Pa m3 s)
24000 rpm
12 minutes
Any orientation

3 liters / minute
5-25 (41-77) °C (°F)
3 cm² / Kgf
50 (8.4 x 10-2) sccm (Pa m3 s)
200 to 240 V a.c. (±10%)
1.5 kVA
105 (231.48) kg (lb)
12 (26.46) kg (lb)

ISO320F
KF40

4000 l s^-1
2500 l s^-1

>10⁸
6 x 10³
10^-7 (10^-9) order Pa (mbar)
266 (2.66) Pa (mbar)

2800 (4.73) sccm (Pa m3 s)
2150 (3.63) sccm (Pa m3 s)
24000 rpm
12 minutes
Any orientation

3 liters / minute
5-25 (41-77) °C (°F)
3 cm² / Kgf
50 (8.4 x 10-2) sccm (Pa m3 s)
200 to 240 V a.c. (±10%)
1.5 kVA
105 (231.48) kg (lb)
105 (231.48) kg (lb)

VG350
KF40

4300 l s^-1
2500 l s^-1

>10⁸
6 x 10³
10^-7 (10^-9) order Pa (mbar)
266 (2.66) Pa (mbar)

2800 (4.73) sccm (Pa m3 s)
2150 (3.63) sccm (Pa m3 s)
24000 rpm
12 minutes
Any orientation

3 liters / minute
5-25 (41-77) °C (°F)
3 cm² / Kgf
50 (8.4 x 10-2) sccm (Pa m3 s)
200 to 240 V a.c. (±10%)
1.5 kVA
97 (213.85) kg (lb)
105 (231.48) kg (lb)