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Turbo vacuum pumps: Edwards (formely known as BOC Edwards) turbomolecular vacuum pumps

Edwards vacuum (formerly BOC Edwards) Turbomolecular pumps: Edwards STP-iX455 turbomolecular pump

Edwards (formerly BOC Edwards) Vacuum - Turbo pumps and accessories

EXT turbomolecular pumps

EXT75DX compound turbomolecular pump
EXT255DX compound turbomolecular pump
EXT255H compound turbomolecular pump
EXT406PX compound turbomolecular pump
EXT556H compound turbomolecular pump

Turbomolecular pump controllers

Edwards Vacuum: EXC controllers
Edwards Vacuum: TIC turbo controller
Edwards: TIC turbo & instrument controller

EXT accessories

Edwards EXT accessories
EXT pump to controller cable
EXT ACX air-cooler
EXT BX bakeout band
EXT PRX10 purge-restrictor
EXT TAV vent-valve
EXT Vent-port adaptor
EXT Vibration isolator
EXT VRX vent-restrictor
EXT turbo pump spares

EXPT combined outfits

Edwards EXPT 1 &2 pumping stations

STP magnetically levitated turbomolecular pumps and accessories

Edwards Vacuum - STP turbo pumps
STP-XA4503C turbomolecular pump
STP-iX455 turbomolecular pump
STP301/STP301C turbomolecular pump
STP-L301/STP-L301C turbomolecular pump
STP603/STP603C turbomolecular pump
STP1003/STP1003C turbomolecular pump
STPH301C high performance turbo pump
STPH451C high performance turbo pump
STPA803C "advantage" turbo pump
STPA1303C "advantage" turbo pump
STPA1603C turbomolecular pump
STPA2203C "advantage" turbo pump
STP-XA2703C turbo pump
STP-XA3203C turbo pump

Edwards turbo molecular pumps (turbo vacuum pumps) overview, information and definitions

Edwards Vacuum - STP-iX455 turbomolecular pump

The STP-iX455 turbomolecular pump with integrated controller employs an innovative magnetic bearing system.

The new magnetic bearing system reduces vibration by 50% in comparison to existing products. This pump is well suited for use with electron microscopes, metrology systems, and for lithography systems where low vibration is critical to the application. It is also suitable for a wide range of PVD, ALD, Etch and curing processes. STP-iX455 operates on 48 V d.c. eliminating the need for a conventional rack-mounted control unit and connection cable. With numerous optional accessories available, an optimum configuration can be found for each application.

Edwards Vacuum - STP-iX455 turbomolecular pump Features & benefits

Innovative New Magnetic Bearing System

•New concept self-sensing MB technology enables significantly reduced pump vibration and cuts down magnetic fields leakage

•Digital 5-axis magnetic bearing control provides stability to external

vibration or impact
Compact Design

•Integrated controller eliminates the bulky controller cable and conventional rack mounted control unit

•Operates with 48 V d.c. only

•Ambient Cooling (optional fan accessory for high gas throughput applications)

Low Vibration

•AVR (Auto Vibration Reduction) minimizes the rotate system vibration during acceleration

•ABS (Auto Balancing System) equipped as standard

Reliability

•Reliable 5 axis maglev technology

•Warning and maintenance functions

Certifications

•Conforms to international safety standards

•CE marked, UL listed SEMI compliant

Edwards Vacuum - STP-iX455 turbomolecular pump Pumping speed

(pumping speed vs inlet pressure)

Edwards Vacuum - STP-iX455 turbomolecular pump Compression ratio

(compression ratio CR vs backing pressure)

Edwards Vacuum - STP-iX455 turbomolecular pump Dimensions

Edwards Vacuum - STP-iX455 turbomolecular pump Technical data

Inlet flange size ISO100K/DN100CF
Pumping speed

N2 300 l s^-1
H2 300 l s^-1

Inlet flange size ISO160K/DN1600CF
Pumping speed

N2 450 l s^-1
H2 460 l s^-1

Compression ratio

N2 >10⁸
H2 >1 x 10⁴

Ultimate pressure
DN Flange
10^-8 order Pa
ISO Flange
6.5 x 10^-6 order Pa
Maximum working pressure
1.3 x 10^-1Pa
Allowable backing pressure
67 Pa
Rated speed
55000 rpm
Starting time
<6 min
Mounting position
Any orientation
Cooling Method
Natural air cooling(air cooling when baking and gas pumping)
Lubricating oil
not necessary
Backing pump
240 l min^-1
Leakage Magnetic Flux
Axial direction
<100 m Gauss
Radial direction
<100 m Gauss
Ambient temperature range
0 to 40 ºC
Storage temperature range
-25 to 55 ºC
Weight
15 kg / 16 kg

Edwards Vacuum - STP-iX455 turbomolecular pump Optional accessory

Optional accessories A number of accessories are available to meet optimum configuration in
each application.

Edwards Power supply unit iPS-240

This is a power supply unit for operation from 100-200 V a.c. power
source.

•STP-Link communication port on the front panel
•Possible to dock with the iDT-001 display unit and becomes an integrated power supply with an LCD display.

Edwards Vacuum - Power supply unit iPS-240 Technical data

Input voltage
100-240 V a.c.
Input power Max
300 VA
Input frequency
50/60 Hz
Inrush current
<40 A
Leakage current
<1.0 mA
Output voltage
48 ± 2 V d.c.
Rated output current
5 A
Over-voltage protection
55.2-64.8 V d.c.
Over-current protection
Output fuse (7A, Fast-blow type)
Withstand voltage
Between input and FG: 1500 V a.c., 1 min between input and output: 2300 V a.c., 1 min (current limit: 20 A)
Allowable ambient temperature
0 to 40 ºC
Storage temperature
-20 to 55 ºC
Mass
3 kg

Edwards Vacuum - STP-iX455 turbomolecular pump Display unit iDT-001

This is a handy terminal display and manual control unit for visual
feedback of performance and for direct control of the pump.

• A plug-and-play unit connecting with the STP-iX455 or iPS-240
• Docking connection available with the iPS-240
• Displays operational status on the LCD panel

Edwards Vacuum - STP-iX455 turbomolecular pump Display unit iDT-001

Edwards Vacuum - STP-iX455 turbomolecular pump Ordering information

Product description Order No.
STP-iX455 Pump
ISO100K PT640Z010
ISO160K PT640Z020
DN100CF PT640Z050
DN160CF PT640Z060
iPS-240 Power Supply PT64W0Z00
STP-iX455-iPS-240 interconnection cable
5 m PT64Y0B20
10 m PT64Y0B30
15 m PT64Y0B40
20 m PT64Y0B50
Power supply cable for iPS-240
3 m PT64Y0A10
5 m PT64Y0A20
iDT-001 Display Unit PT64W1Z00