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Turbo vacuum pumps: Edwards (formely known as BOC Edwards) turbomolecular vacuum pumps

Edwards vacuum (formerly BOC Edwards) Turbomolecular pumps: Edwards STP1003/STP1003C turbomolecular pump

Edwards (formerly BOC Edwards) Vacuum - Turbo pumps and accessories

EXT turbomolecular pumps

EXT75DX compound turbomolecular pump
EXT255DX compound turbomolecular pump
EXT255H compound turbomolecular pump
EXT406PX compound turbomolecular pump
EXT556H compound turbomolecular pump

Turbomolecular pump controllers

Edwards Vacuum: EXC controllers
Edwards Vacuum: TIC turbo controller
Edwards: TIC turbo & instrument controller

EXT accessories

Edwards EXT accessories
EXT pump to controller cable
EXT ACX air-cooler
EXT BX bakeout band
EXT PRX10 purge-restrictor
EXT TAV vent-valve
EXT Vent-port adaptor
EXT Vibration isolator
EXT VRX vent-restrictor
EXT turbo pump spares

EXPT combined outfits

Edwards EXPT 1 &2 pumping stations

STP magnetically levitated turbomolecular pumps and accessories

Edwards Vacuum - STP turbo pumps
STP-XA4503C turbomolecular pump
STP-iX455 turbomolecular pump
STP301/STP301C turbomolecular pump
STP-L301/STP-L301C turbomolecular pump
STP603/STP603C turbomolecular pump
STP1003/STP1003C turbomolecular pump
STPH301C high performance turbo pump
STPH451C high performance turbo pump
STPA803C "advantage" turbo pump
STPA1303C "advantage" turbo pump
STPA1603C turbomolecular pump
STPA2203C "advantage" turbo pump
STP-XA2703C turbo pump
STP-XA3203C turbo pump

Edwards turbo molecular pumps (turbo vacuum pumps) overview, information and definitions

Edwards Vacuum STP1003/STP1003C turbomolecular pump

Edwards STP1003 and corrosion resistant STP1003C are new turbomolecular pumps for use in the most advanced of semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. Both pumps have been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Edwards Vacuum STP1003/STP1003C turbomolecular pump Features & benefits

Advanced rotor technology

• Maximized process flexibility

• Oil free

• Low vibration

• High reliability

• Maintenance free

• Harsh process compatible (C version)

• Increased life

Advanced controller design

• Auto tuning

• Self diagnostic functions

• d.c. motor drive

• Battery-free operation

Compact design

• Small footprint

• Half rack controller

Edwards Vacuum STP1003/STP1003C turbomolecular pump Compression ratio

(compression ration CR vs backing pressure)

Edwards Vacuum STP1003/STP1003C turbomolecular pump Pumping speed

(pumping speed vs inlet pressure)

Edwards Vacuum STP1003/STP1003C turbomolecular pump Dimensions

A Electrical connector
B Outlet port
C Purge port (C version only)

Edwards Vacuum STP1003/STP1003C turbomolecular pump Controller

Edwards Vacuum STP1003/STP1003C turbomolecular pump L-type connector

A Polarizing groove
B Outlet port
C Polarizing boss

Edwards Vacuum STP1003/STP1003C turbomolecular pump Technical data

Inlet flange: ISO200F / DN200CF
Outlet port: KF40
Purge port: KF10 (C version only)
Pumping speed
N2: 1000 L s^-1
H2: 800 L s^-1
Compression ratio
N2: >10⁸
H2: >10⁵
Ultimate pressure with bake out heating
ISO inlet flange 10^-7 (10^-9) order Pa (Torr)
CF inlet flange (not C version) 10^-8 (10^-10) order Pa (Torr)
CF inlet flange (C version only) 6.5 x 10^-6 (5 x 10^-8) Pa (Torr)
Maximum continuous outlet pressure* 13 (0.1) Pa (Torr)
Rated speed 35000 rpm
Starting time 6 min
Maximum inlet flange temperature 120 ºC
Input voltage 100 to 120 V a.c. (±10%) or
200 to 240 V a.c. (±10%)
Power consumption (continuous) 0.8 kVA
Weight
Pump 31 kg
Controller 9 kg
* Water cooled
** With cooling water, for bakeout

Edwards Vacuum STP1003/STP1003C turbomolecular pump Ordering information

Product description Order No.
STP pump is supplied with an inlet screen. For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below.

STP1003
ISO200F PT390Z001
DN200CF B72101040

STP1003C
ISO200F B72101030
DN200CF PT39AZ003

Controller
100 V-120 V/200-240 V 50/60 Hz RS232C PT56Z0Z00

Connection cables

Straight connector
3 m B75130050
5 m B75130020
10 m B75130060

Power cables
Ring terminal 5 m PT46Y0A01
Ring terminal 10 m PT46Y0A10

Options

Water cooling coil
Horizontal fitting RC1/4 B72132020

Vibration Isolator
ISO200 B58061000