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Edwards (formerly BOC Edwards) Vacuum Gauges and Vacuum Calibration

Edwards (formerly BOC Edwards) Model 655, 658 and 659 Barocel ® Vacuum Pressure Transducer

The 655 series of Barocel transducers employ a number of proprietary design features to enhance reliability and performance. The sensing cell utilises a unique diaphragm design, stitch welding process, and a new sensing cavity geometry which provides enhanced resistance to particulate contamination. Performance is further improved by isolating the sensor in a patented, temperature controlled, hermetically sealed enclosure which neutralises the affect of barometric pressure, humidity and ambient temperature changes. The result is a transducer offering long term stability.

Edwards (formerly BOC Edwards) Model 655, 658 and 659 Barocel ® Vacuum Pressure Transducer

Features and Benefits

Wide measuring range – Full four decade measurement
High accuracy – 0.15% of reading
High resolution – better than 0.0005% full scale
Temperature controlled – Internal temp maintained at 45, 100 or 123°C depending on the model selected – improved zero stability: Better than 0.002% FS / °C
True total pressure – calibration and measurement independent of gas composition
High level d.c. Output

Edwards (formerly BOC Edwards) Model 655, 658 and 659 Barocel ® Vacuum Pressure Transducer

Applications

Plasma deposition/etch
Sputtering/PVD/RTP
Industrial CVD/Ion implantation
LPCVC
Crystal growing/Freeze dryers

Edwards (formerly BOC Edwards) Model 655, 658 and 659 Barocel ® Vacuum Pressure Transducer

Technical specification

Pressure ranges:
0-50, 0-100m Torr
0.1, 0-2, 0-5, 0-10, 0-100 Torr and mbar
0-1000 Torr
other ranges also available
Accuracy: ± ( 0.15% of reading + 0.005% of full scale)
Repeatability: ±0.01% of full scale
Resolution: ±0.005% full scale
Warm up time: 2 hours
Heater temperature

Ambient operating temperature
655 15-40°C
658 15-70°C
959 15-70°C
Storage temperature: -45°C to +85°C
Temperature effect on zero
>1 Torr: <0.002% of full scale / °C
≤1 Torr: <0.005% of full scale / °C
Temperature affect on sensitivity < 0.02% reading/ °C
Barometric pressure effects <0.005% of full scale / 760 Torr
Ambient relative humidity effects: <0.005% of full scale in range | 0-95% RH
Overpressure limit: 13.1 bar abs (45 psia)
Leak rate to ambient: <1 x 10^-10 std cc / sec at 760 Torr applied pressure
Material exposed to process: Inconel and Monel, 316 ss
Internal Volume: 8.33cc (includes 1/2” OD tube)
Power requirements:
655 250 mA max
658 500 mA max
659 700 mA max
Output signal: 0-10 V d.c. Linear with pressure
Output Impedance < 0.1 ohms
Output noise (0-2 Khz) < 0.002% of full scale rms
Weight: 0.55 KG (1.2lb)
Standards
Electronic design: EN 61010-1
Electromagnetic compatibility: EN 61326 Industrial Location, Class A Emissions

Edwards (formerly BOC Edwards) Model 655, 658 and 659 Barocel ® Vacuum Pressure Transducer

Fitting DIM”X”
Mini ConFlat® 35mm/1.37 in
Cajon 8VCR 62mm/2.44 in
Cajon 8VCO 44mm/1.73 in
NW16 36mm/1.41 in
Tri-clover 34mm/1.33 in

Edwards (formerly BOC Edwards) Model 655, 658 and 659 Barocel ® Vacuum Pressure Transducer

Accessories
Adapter cable Burocel 655 to AGC (female FCC68) 0.5m: D40003050