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Turbo vacuum pumps: Edwards (formely known as BOC Edwards) turbomolecular vacuum pumps

Edwards vacuum (formerly BOC Edwards) Turbomolecular pumps: EXT75DX compound turbomolecular pump

Edwards (formerly BOC Edwards) Vacuum - Turbo pumps and accessories

EXT turbomolecular pumps

EXT75DX compound turbomolecular pump
EXT255DX compound turbomolecular pump
EXT255H compound turbomolecular pump
EXT406PX compound turbomolecular pump
EXT556H compound turbomolecular pump

Turbomolecular pump controllers

Edwards Vacuum: EXC controllers
Edwards Vacuum: TIC turbo controller
Edwards: TIC turbo & instrument controller

EXT accessories

Edwards EXT accessories
EXT pump to controller cable
EXT ACX air-cooler
EXT BX bakeout band
EXT PRX10 purge-restrictor
EXT TAV vent-valve
EXT Vent-port adaptor
EXT Vibration isolator
EXT VRX vent-restrictor
EXT turbo pump spares

EXPT combined outfits

Edwards EXPT 1 &2 pumping stations

STP magnetically levitated turbomolecular pumps and accessories

Edwards Vacuum - STP turbo pumps
STP-XA4503C turbomolecular pump
STP-iX455 turbomolecular pump
STP301/STP301C turbomolecular pump
STP-L301/STP-L301C turbomolecular pump
STP603/STP603C turbomolecular pump
STP1003/STP1003C turbomolecular pump
STPH301C high performance turbo pump
STPH451C high performance turbo pump
STPA803C "advantage" turbo pump
STPA1303C "advantage" turbo pump
STPA1603C turbomolecular pump
STPA2203C "advantage" turbo pump
STP-XA2703C turbo pump
STP-XA3203C turbo pump

Edwards turbo molecular pumps (turbo vacuum pumps) overview, information and definitions

Our range of EXT turbomolecular and compound molecular pumps and EXC Controllers uses state-of-the-art technology to provide reliable, high and ultra high vacuum.

EXT75DX compound turbomolecular pump

EXT75DX compound turbomolecular pump - Features & benefits

Compatible with TIC Turbo and Instrument Controller
Multiple communication modes available

Parallel mode allows traditional control signal interface
Serial mode allows RS-232 interface

Numerous user configurable parameters via RS-232 interface

Vent valve control settings
Normal speed indication
Stand-by running speed
Programmable power settings
Power consumption
Pump temperature

Enhanced monitoring capability including pump speed, power and temperature

EXT75DX compound turbomolecular pump - Technical data

Inlet flange: DN63ISO-K, DN63CF or DN40NW
Compression ratio
N2: >1 × 10¹¹
He: 1 x 10⁶
H2: 5 x 10⁴
Outlet flange: DN16NW
Interstage port (Hi variants): DN25NW
Recommended backing pump*: 1 E2M0.7
Vent port: 1/8 inch BSP
Purge port: 1/8 inch BSP
Maximum continuous inlet pressure (light gas pumping) **
water cooling (water at 15 °C ambient temp at 40 °C): 2 × 10^-2 mbar
forced air cooled, 35 °C ambient: 1 × 10^-2 mbar
Nominal rotational speed: 90000 rpm
Standby rotational speed: Variable from 49500 to 90000 rpm (63000 rpm default)
Start time 90% speed***: 110 s
Cooling method: Forced air / water
Ambient air temperature for forced air cooling: 5-35 °C
Minimum cooling water flow rate (water 15 °C): 15 L h^-1
Water temperature range: 10-20 °C
Maximum inlet flange temperature: 100 °C
Operating attitude: Vertical and upright, through to horizontal
Noise level at 1 metre: <50 dB(A)
Maximum magnetic field: 5 mT
Recommended controller: TIC100 turbo or turbo and instrument controlled
Quiescent electrical power: 10 W
Interstage pumping speed (Hi variants): 4 l s-1

Inlet flange
Pumping speed (l s-¹)***
N2
He
H2
Ultimate pressure (mbar)
With rotary vane backing pump****
With diaphragm backing pump*****
Weight (kg)

ISO63

61
57
53

<5 × 10^-9
<5 × 10^-83.0

63CF

61
57
53

<5 × 10^-10
<5 × 10^-94.9

DN40NW

42
49
48

<5 × 10^-9
<5 × 10^-82.9

ISO100

66
59
54

<5 × 10^-9
<5 × 10^-83.2

* A larger backing pump may be required for maximum throughput. A suitable diaphragm pump with ultimate <5 mbar may also be used.
** Above this inlet pressure, rotational speed drops to below nominal.
*** Power limit set to 80 W.
**** Ultimate pressure 48 hours after bakeout with 2 stage rotary vane backing pump.
***** Ultimate pressure 48 hours after bakeout with Pb <5 mbar (500 Pa)

EXT75DX compound turbomolecular pump - Pumping speed

EXT75DX - Pumping speed vs inlet pressure

EXT75DX compound turbomolecular pump - Pumping speed

EXT75DX compound turbomolecular pump - Throughput

EXT75DX - Throughput vs inlet pressure

EXT75DX compound turbomolecular pump - Throughput

EXT75DX compound turbomolecular pump - Dimensions

A Manual vent valve in vent port
B Podule
C Logic interface connector
D Backing Port
E Purge Port (blanked off)
F Interstage port (EXT75iDX only)
G Podule connector socket
H Earth Connection

EXT75DX compound turbomolecular pump - Ordering information

Product description                                                     Order No.
Pump                          Inlet flange
EXT75DX ISO63           DN63ISO                                B72241000
EXT75DX CF63              DN63CF                                 B72242000
EXT75DX NW40             DN40NW                                B72243000
EXT75DX ISO100           DN100ISO                              B72245000
EXT75iDX ISO63            DN63ISO (main)                    B72237000
                                           DN16NW (interstage)

EXT75iDX ISO63            DN63ISO (main)                    B72238000
                                           DN25NW (interstage)

EXT75iDX NW40            DN40NW (main)                  B72235000
                                           DN16NW (interstage)

EXT75DX ISO100         DN25NW (backing)           B72246000
Accessories
ACX75 air cooling accessory                                         B58053075
WCX250 water cooling accessory                                 B73600121