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Turbo vacuum pumps: Edwards (formely known as BOC Edwards) turbomolecular vacuum pumps

Edwards vacuum (formerly BOC Edwards) Turbomolecular pumps: Edwards STPH301C turbomolecular pump

Edwards (formerly BOC Edwards) Vacuum - Turbo pumps and accessories

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Edwards turbo molecular pumps (turbo vacuum pumps) overview, information and definitions

Edwards Vacuum STPH301C high performance turbomolecular pump

Edwards high performance STPH301C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pump’s field proven reliability and class-leading performance give maximum process flexibility. The STPH301C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Edwards Vacuum STPH301C high performance turbomolecular pump

STPH301C high performance turbomolecular pump Features & benefits

Advanced rotor technology

• Higher gas throughput

• Maximized process flexibility

• Oil free

• Low vibration

• High reliability

• Maintenance free

• Harsh process compatible

• Increased life

Advanced controller design

• Auto tuning

• Self diagnostic functions

• d.c. motor drive

• Battery-free operation

Compact design

• Small footprint

• Half rack controller

5 axis magnetic suspension system

• Zero contamination

• Low maintenance

• Any orientation operation

STPH301C high performance turbomolecular pump L type connector

A Polarizing groove
B Outlet port
C Polarizing boss

STPH301C high performance turbomolecular pump Speed and power curves

STPH301C high performance turbomolecular pump Dimensions

A Electrical connector
B Outlet port
C Purge port
D Cooling water out
E Cooling water in

STPH301C high performance turbomolecular pump
Technical data

Inlet flange:
ISO100K / DN100CF
Outlet port:
KF40
Purge port:
KF10
Water cooling fitting:
PT1/4
Pumping speed
N2: 300 l s-1
H2: 200 l s-1
Compression ratio
N2: >108
H2:103
Ultimate pressure with bake out heating
10-7 (10-9) order Pa (Torr)
Maximum continuous outlet pressure*
660 (5) Pa (Torr)
Maximum Nitrogen throughput*
2500 sccm
Rated speed
48000 rpm
Starting time
4 min
Maximum inlet flange temperature
120 ºC
Input voltage
100 to 120 V a.c. (±10%) or
200 to 240 V a.c. (±10%)
Power consumption
0.6 kVA
Weight
Pump
15 kg
Controller
9 kg
* Water cooled

STPH301C high performance turbomolecular pump
Ordering information

Product description Order No.
STP pump is supplied with an inlet screen.
For a complete installation order an STP pump, a controller, a
connection cable and power cable from the information below.

STPH301C
ISO100K inlet B71901010
DN100CF inlet PT340Z004

Controller
100-120 V/200-240 V 50/60 Hz RS232C PT56Z0Z00

Connection cables

Straight connector
3 m B75130050
5 m B75130020
10 m B75130060

Power cables
Ring terminal 5 m PT46Y0A01
Ring terminal 10 m PT46Y0A10

TMS system is available for this model. For a complete installation
order an STP pump (TMS), a controller, a TMS connection cable
kit, a connection cable, and power cable is required.

STPH301CV (TMS)
ISO100F PT3416001
DN100CF PT3416005

TMS connection cable kit
5 m PT330V000
10 m PT330V001
15 m PT330V002