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Turbo vacuum pumps: Edwards (formely known as BOC Edwards) turbomolecular vacuum pumps

Edwards vacuum (formerly BOC Edwards) Turbomolecular pumps: Edwards STPA1603C turbomolecular pump

Edwards (formerly BOC Edwards) Vacuum - Turbo pumps and accessories

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STPA1603C turbomolecular pump
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Edwards turbo molecular pumps (turbo vacuum pumps) overview, information and definitions

Edwards vacuum turbo pumps - STPA1603C turbomolecular pump

The small and powerful Edwards STPA1603C turbo-molecular pump has been designed using Edwards advanced rotor technology. This provides high throughput, maximum reliability and class leading performance which is demanded by the latest generation of semiconductor processes. Its half rack controller and compact design provide considerable space saving, whilst its advanced deposition reduction system gives improved reliability and performance. The STPA1603C has been qualified on the latest 200 mm etch tools as well as on new generation 300 mm oxide etch processes.

Edwards vacuum turbo pumps - STPA1603C turbomolecular pump
Features & benefits

Advanced Rotor Design

• Increased performance

• Higher gas throughput

• High reliability

• Maintenance free

• Harsh process compatible

5 Axis Magnetic Suspension System

• Zero contamination

• Low vibration

Corrosion Resistant

• Harsh process compatible

• Increased life

Compact Construction

• Small footprint

• Half rack controller

Advanced Controller Design

• Tuning free

• Self diagnostic functions

• d.c. motor drive

• Battery-free operation

Edwards vacuum turbo pumps - STPA1603C turbomolecular pump
L type connector

A Polarizing groove
B Outlet port
C Polarizing boss

Edwards vacuum turbo pumps - STPA1603C turbomolecular pump
Speed and power curves

Edwards vacuum turbo pumps - STPA1603C turbomolecular pump
Dimensions

A Electrical connector
B Outlet port
C Purge port
D Cooling water out
E Cooling water in

Edwards vacuum turbo pumps - STPA1603C turbomolecular pump
Controller

Edwards vacuum turbo pumps - STPA1603C turbomolecular pumpTechnical data

Inlet flange
ISO200F / DN200CF
Outlet port
KF40
Purge port
KF16
Water cooling fitting
PT1/4
Pumping speed
N2 1600 l s^-1
H2 1200 l s^-1
Compression ratio
N2 >10⁸
H2 >7 x 10³
Ultimate pressure with bake out heating
10^-7 Pa
Maximum allowable backing pressure
266 (2.0) Pa (Torr)
Maximum nitrogen throughput
2500 sccm
Rated speed
36500 rpm
Starting time
7 min
Mounting position
Any
Water cooling
Flow
2 l min^-1
Temperature
5-25 ºC
Pressure
3 kgf / cm^-2
Recommended purge gas flow
20 sccm
Input voltage
200 – 240 V a.c. (±10%)
Typical power consumption
0.85 kVA
Weight
Pump 35 kg
Controller 9 kg

Edwards vacuum turbo pumps - STPA1603C turbomolecular pump
Ordering information

Product description Order No.
STP pump is supplied with an inlet screen.
For a complete installation order an STP pump, a controller, a
connection cable and power cable from the information below.

STPA1603C
ISO200F B75100010
DN200CF B75100100

Controller
200-240 V 50/60 Hz RS232C PT56Z0Z00

Connection cables

Straight connector
3 m B75130050
5 m B75130020
10 m B75130060

Power cable
Ring terminal 5 m PT46Y0A01
Ring terminal 10 m PT46Y0A10

TMS system is available for this model. For a complete installation
order an STP pump (TMS), a controller, a TMS connection cable
kit, a connection cable, and power cable is required.

STPA1603CV (TMS)
ISO200F PT4616004
DN2000CF PT4616005

TMS connection cable kit
5 m PT461V000
10 m PT461V001
15 m PT461V002