Edwards vacuum Vacuum pump products Vacuum pump services & repairs Vacuum spares and vacuum parts Vacuum manufacturers
Home About Absolute Vacuum Vacuum pump resources Contact Absolute Vacuum Newsletter Modulyo Freeze Drying

Turbo vacuum pumps: Edwards (formely known as BOC Edwards) turbomolecular vacuum pumps

Edwards vacuum (formerly BOC Edwards) Turbomolecular pumps: Edwards STP magnetically levitated turbomolecular pumps

Edwards (formerly BOC Edwards) Vacuum - Turbo pumps and accessories

EXT turbomolecular pumps

EXT75DX compound turbomolecular pump
EXT255DX compound turbomolecular pump
EXT255H compound turbomolecular pump
EXT406PX compound turbomolecular pump
EXT556H compound turbomolecular pump

Turbomolecular pump controllers

Edwards Vacuum: EXC controllers
Edwards Vacuum: TIC turbo controller
Edwards: TIC turbo & instrument controller

EXT accessories

Edwards EXT accessories
EXT pump to controller cable
EXT ACX air-cooler
EXT BX bakeout band
EXT PRX10 purge-restrictor
EXT TAV vent-valve
EXT Vent-port adaptor
EXT Vibration isolator
EXT VRX vent-restrictor
EXT turbo pump spares

EXPT combined outfits

Edwards EXPT 1 &2 pumping stations

STP magnetically levitated turbomolecular pumps and accessories

Edwards Vacuum - STP turbo pumps
STP-XA4503C turbomolecular pump
STP-iX455 turbomolecular pump
STP301/STP301C turbomolecular pump
STP-L301/STP-L301C turbomolecular pump
STP603/STP603C turbomolecular pump
STP1003/STP1003C turbomolecular pump
STPH301C high performance turbo pump
STPH451C high performance turbo pump
STPA803C "advantage" turbo pump
STPA1303C "advantage" turbo pump
STPA1603C turbomolecular pump
STPA2203C "advantage" turbo pump
STP-XA2703C turbo pump
STP-XA3203C turbo pump

Edwards turbo molecular pumps (turbo vacuum pumps) overview, information and definitions

Edwards STP magnetically levitated turbomolecular pumps

•Designed by continuous improvement on existing proven reliable technology
•Advanced materials and designs provide:

Class leading performance

Low vibration

Guaranteed reliability

Low cost of ownership

•The broad product range covers all potential turbo pump applications.
•ualified by all major semiconductor OEM’s
•Used in all major semiconductor fabrication plants
•Installed base of over 80000 units, 85% in the semiconductor industry

Edwards STP magnetically levitated turbomolecular pumps - Key features

Multi-axis magnetic bearing system
•High Throughput versions for high flow processes
•Low vibration characteristics
•Advanced controller technology
•Full interfacing capability

Edwards STP magnetically levitated turbomolecular pumps - Features & benefits

•Improved pumping performance

Optimized for semiconductor process pressures

Maximized gas throughput for each flange size

Applications specific models

•New generation universal controllers
•Compact (1/2 rack) controller

Auto tune enabling "mix and match" pumps

Integrated TMS control

Improved diagnostics

•High power d.c. motor drive

Fast ramp-up time

Self regeneration upon

Edwards is a leader in clean and dry vacuum technology. The first STP pumps were sold in 1983 and there are now over 80000 installations worldwide. 85% are operating on semiconductor process tools where they demonstrate exceptional levels of reliability. STP pumps are the first choice for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration.

•Proven reliability.
•Clean oil-free high vacuum.
•Complete range from 300 to 4500 l s-1.
•Application specific models.
•Very low noise and vibration.
•Low cost of ownership.
•Virtually maintenance free.
•Installation in any orientation.
•Full remote control interface.
•Supported globally by Edwards

Proven magnetic bearing technology

The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance.

Edwards STP range

Edwards UHV series

The Ultra High Vacuum series of magnetically levitated turbo molecular pumps are the products of choice for the semiconductor, surface science or high energy physics industries. They offer unrivalled reliability, performance, cleanliness and class leading low vibration levels. The pumps are all d.c. powered, eliminating the need for batteries, they use a half rack controller which features auto-tuning and advanced diagnostic features. The range contains pumps with speeds from 300 l s-1 to 1000 l s-1 all of which are available in ISO or CF flange variants.

Edwards High throughput series

The high throughput series of magnetically levitated turbo pumps generate the high gas flows required by the current generation of semiconductor etch, ion implant and LCD systems. All the pumps feature a five active axis magnetic bearing system and a d.c. drive for increased robustness and stability. They use a Holweck stage to provide advanced throughput performance. They operate via a half rack controller with auto-tuning, advanced diagnostics and an integrated temperature management system The range operates with throughput speeds from 300 l s-1 to 1300 l s-1.

Edwards Advantage series

The new Advantage series of magnetically levitated turbo pumps have been designed to provide the highest levels of throughput required by the next generation of semiconductor etch and CVD processes. They have been developed, using continuous improvement techniques, from the ultra reliable, high performance H series of products. Their advanced rotor design combined with selection of the best materials has allowed the creation of the next generation of high throughput turbo pump inside the same footprint as many of the existing models. The range contains pumps with throughput speeds from 800 l s-1 to 4500 l s-1.

Edwards STP features

Edwards STP magnetically levitated turbomolecular pumps

Edwards Oil free

All STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in the semiconductor industry (where device densities are constantly increasing) and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements).

Maintenance free

Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination.

Vibration free

Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peak-to-peak vibration level is less than 0.02 µm. This amplitude remains constant throughout the life of the pump and is free from troublesome sub-harmonics.

Edwards STP magnetically levitated turbomolecular pumps

Vibration analysis STP300 displacement/frequency

Automatic balancing system (ABS)

ABS is a unique patented

development of 5-axis technology. If any rotor imbalance is introduced (by deposition of process by-products, for example), sensors in the pump detect changes in the rotor motion and compensate the magnetic bearing fields to allow the rotor to spin on its natural inertial axis. This minimizes the vibration transmitted to the inlet flange. ABS works at all pump rotational speeds.

Safety backup bearings

STP pumps have dry lubricated axial and radial mechanical bearings as safety backup bearings. These support the rotor and protect the pump in the event of a total disruption of magnetic suspension or a massive air inrush which overcomes the magnetic bearing stiffness. These high precision ball bearings are dry lubricated and are not in contact with the rotor during normal operation.

Optimized rotors

The multistage pure bladed rotors in the UHV pumps provide the high vacuums required for clear beamlines on CD SEM machines, mass spectrometers and ion implanters. They provide optimum pumping performance with excellent light gas compression ratios.

Compound rotors

The high throughput pumps incorporate a Holweck drag stage that increases the pumps throughput at low pressure.

Advanced series compound rotors

The advanced series
pumps have a redesigned compound rotor, the materials of manufacture have been improved to reduce the clearances within the pump, the rotors have an advanced 3D design and the Holweck stage has been redesigned to increase the throughput.

Corrosion resistant

To ensure a high level of resistance to corrosion, the corrosion resistant (C) and high throughput (H-C) pumps have nickel coated rotors/stators and pump internals suitable for ion implantation and plasma etching. Further enhanced levels of protection are available on request.

Nitrogen purging

The corrosion resistant (C) pumps and the high throughput (H-C) pumps have a nitrogen purge facility, a constant flow of nitrogen through the pump dilutes corrosive gases minimizing their damage to the pumps motor and sensor coils.

TMS system

The Edwards Temperature Management System is available on a wide range of turbo pumps. It is designed to optimize the temperature within the pump, dramatically reducing the particle condensation within. This will not only considerably enhance the performance of the pump under harsh process conditions, but also increase its operational life.

Edwards STP magnetically levitated turbomolecular pumps - Applications

Semiconductor fabrication

STP turbomolecular pumps are the number one choice for the world’s leading semiconductor etch and implant manufacturers. The pumps are installed on the harshest applications (for example, metal etch) and demonstrate exceptional levels of reliability.

•Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
•Electron cyclotron resonance (ECR) etch
•Film deposition CVD, PECVD, ECRCVD, MOCVD
•Sputtering
•Ion implantation source, beam line pumping end station
•MBE
•Diffusion
•Photo resist stripping
•Crystal/epitaxial growth
•Wafer inspection
•Load lock chambers

Scientific applications

STP pumps are used extensively in the world’s foremost research and development institutes. The pumps satisfy stringent performance criteria and reliability expectations. They are also used in the following applications:

•Scientific instruments: surface analysis, mass spectrometry, electron microscopy
High energy physics: beam lines, accelerators
•Radioactive applications: fusion systems, cyclotrons

Data summary - Edwards STP magnetically levitated turbomolecular pumps

Edwards STP-XA4503C turbomolecular pump

STP-XA4503C turbomolecular pump

Edwards STP-XA4503C turbomolecular pump

Pumping speed l s-¹:

N2: 3800/4000/4300

H2: 2500

Inlet flange: VG300/ISO320F/VG350
Ultimate pressure with bake
out heating Pa (Torr):

ISO: 10-7 (10-9) order

CF (not C version):

CF (C version only):

Rated speed: 24,000
Control unit:

Edwards STP-iX455 turbomolecular pump

STP-iX455 turbomolecular pump

Pumping speed l s-¹:

N2: 300/450

H2: 300/460

Inlet flange: ISO100K/DN100CF/ISO160K/DN1600CF
Ultimate pressure with bake
out heating Pa (Torr):

ISO:10^-8 DN Flange

CF (not C version):10^-6 ISO Flange

CF (C version only):

Rated speed:
Control unit:

Edwards STP301 - STP301C turbomolecular pump

STP301/STP301C turbomolecular pump

Pumping speed l s-¹:

N2: 300

H2:300

Inlet flange: ISO100/DN100CF
Ultimate pressure with bake
out heating Pa (Torr):

ISO: 6.5 x 10^-6 (5 x 10^-8)

CF (not C version):10^-8 (10^-10) order

CF (C version only): 10^-7 (10^-9) order

Rated speed: 48,000
Control unit: SCU-301/451

Edwards STP-L301 - STP-L301C turbomolecular pump

STP-L301/STP-L301C turbomolecular pump

Edwards STP-L301 - STP-L301C turbomolecular pump

Pumping speed l s-¹:

N2: 260

H2: 290

Inlet flange: ISO100/DN100CF
Ultimate pressure with bake
out heating Pa (Torr):

ISO: 10^-6 (10⁸) order

CF (not C version):

CF (C version only):

Rated speed: 48,000
Control unit: SCU-301/451

Edwards STP603 - STP603C turbomolecular pumpPumping speed l s-¹:

STP603/STP603C turbomolecular pump

Edwards STP603 - STP603C turbomolecular pumpPumping speed l s-1:

Pumping speed l s-¹:

N2: 650

H2: 550

Inlet flange: ISO160F/DN160CF
Ultimate pressure with bake
out heating Pa (Torr):

ISO: 10^-7 (10^-9) order

CF (not C version): 10^-8(10^-10) order

CF (C version only): 6.5 x 10^-6 (5 x 10^-8)

Rated speed: 35,000
Control unit: SCU-750

Edwards STP1003 - STP1003C turbomolecular pump

STP1003/STP1003C turbomolecular pump

Edwards STP1003 - STP1003C turbomolecular pump

Pumping speed l s-¹:

N2: 1000

H2: 800

Inlet flange: ISO200F/DN200CF
Ultimate pressure with bake
out heating Pa (Torr):

ISO: 10^-7 (10^-9) order

CF (not C version): 10^-8 (10^-10)order

CF (C version only): 6.5 x 10^-6 (5 x 10^-8)

Rated speed: 35,000
Control unit:SCU-750

Edwards STPH301C turbomolecular pump

STPH301C high performance turbo pump

Edwards STPH301C turbomolecular pump

Pumping speed l s-¹:

N2: 300

H2: 200

Inlet flange: ISO100K/DN100CF
Ultimate pressure with bake
out heating Pa (Torr):

ISO: 10^-7 (10^-9) order

CF (not C version):

CF (C version only):

Rated speed: 48,000
Control unit: SCU-750

Edwards STPH451C turbomolecular pump

STPH451C high performance turbo pump

Edwards STPH451C turbomolecular pump

Pumping speed l s-¹:

N2: 450

H2: 300

Inlet flange: ISO160K/DN160CF
Ultimate pressure with bake
out heating Pa (Torr):

ISO: 10^-7 (10^-9)order

CF (not C version):

CF (C version only):

Rated speed: 48,000
Control unit:SCU-750

Edwards STPA803C turbomolecular pump

STPA803C "advantage" turbo pump

Edwards STPA803C turbomolecular pump

Pumping speed l s-¹:

N2: 800

H2: 520

Inlet flange: ISO160F/DN160CF
Ultimate pressure with bake
out heating Pa (Torr):

ISO: 10^-7 (10^-9) order

CF (not C version):

CF (C version only):

Rated speed: 32,500
Control unit: SCU-750

Edwards STPA1303C turbomolecular pump

STPA1303C "advantage" turbo pump

Edwards STPA1303C turbomolecular pump

Pumping speed l s-¹:

N2: 1300

H2: 800

Inlet flange: ISO200F/DN200CF
Ultimate pressure with bake
out heating Pa (Torr):

ISO: 10^-7 (10^-9) order

CF (not C version):

CF (C version only):

Rated speed: 32,500
Control unit:SCU-750

Edwards STPA1603C turbomolecular pump

STPA1603C turbomolecular pump

Edwards STPA1603C turbomolecular pump

Pumping speed l s-¹:

N2: 1600

H2: 1200

Inlet flange: ISO200F/DN200CF
Ultimate pressure with bake
out heating Pa (Torr):

ISO: 10-7

CF (not C version):

CF (C version only):

Rated speed: 36,500
Control unit: SCU-750

Edwards STPA2203C turbomolecular pump

STPA2203C "advantage" turbo pump

Edwards STPA2203C turbomolecular pump

Pumping speed l s-¹:

N2: 2200

H2: 1700

Inlet flange: ISO250F/ICF305
Ultimate pressure with bake
out heating Pa (Torr):

ISO: 10^-6(10^-8)order

CF (not C version):

CF (C version only):

Rated speed: 27,000
Control unit: SCU-1500

Edwards STP-XA2703C turbomolecular pump

STP-XA2703C turbo pump

Edwards STP-XA2703C turbomolecular pump

Pumping speed l s-¹:

N2: 2650

H2: 2050

Inlet flange: ISO250F/VG250
Ultimate pressure with bake
out heating Pa (Torr):

ISO: 10-7 order

CF (not C version):

CF (C version only):

Rated speed: 27,500
Control unit: SCU-1500

Edwards STP-XA3203C turbomolecular pump

STP-XA3203C turbo pump

Edwards STP-XA3203C turbomolecular pump

Pumping speed l s-¹:

N2: 3200

H2: 2300

Inlet flange: ISO320F/VG300
Ultimate pressure with bake
out heating Pa (Torr):

ISO: 10-7 order

CF (not C version):

CF (C version only):

Rated speed: 27,500
Control unit: SCU-1500

Edwards SCU750 control unit turbomolecular pump Control unit

Magnetic bearing control system: Digital control
Input voltage:

AC100 . 100-120
± 10% V a.c./AC200
200-240 ± 10% V a.c.

Power consumption VA
Without TMS: Max 850
With TMS: Max 1200
Input frequency Hz: 50/60 ± 2
Leak current mA: Max 3.5
Input phase:
Main breaker rated current A: 10
Motor driving system: Three phase DC brush less motor driver
Allowable ambient temperature °C: 0 . 40
Storage temperature °C: -25 . 55
Mass kg: 8.5
TMS control unit: Built in
Serial communication function: -

RS232: Standard

RS485: Standard

Panel display: LCD (20 characters, 2 lines)

Edwards SCU-1500 control unit turbomolecular pump Control unit

Magnetic bearing control system: Digital control
Input Voltage: 200 to 240 ± 10% V a.c.
Power consumption VA

Without TMS: 1500

With TMS: 2100

Input frequency Hz: 50/60 ± 2
Leak current mA: Max 3.5
Input phase: Single Phase
Main breaker rated current A: 15
Motor driving system: Three phase DC brush less motor driver
Allowable ambient temperature °C: 0 to 40
Storage temperature °C: -25 to 55
Mass kg: 12
TMS control unit: Built in
Serial communication function:

RS232: Standard

RS485: Standard

Panel display: -